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5 March 2022 Multi-wavelength volumetric lithography
Alexander Kostenko, Aditya Narayanan
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Proceedings Volume PC12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV; PC120120I (2022) https://doi.org/10.1117/12.2607196
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
Modern Two-Photon Lithography (TPL) is a golden standard among various 3D micro- and nano-fabrication techniques. The two-photon absorption phenomenon allows to selectively initiate the polymerization reaction in different points in 3D space, enabling accurate point-by-point 3D. TPL has a well-known constraint, the limited speed of printing related to the time it takes to scan a volume by a focused femtosecond laser beam. The inherent need for extremely high illumination intensity required for initiation of the polymerization reaction poses a fundamental problem. We are developing an alternative 3D printing technique based on a multi-wavelength polymerization process that requires orders of magnitude lower illumination intensities while still allowing localization of the polymerization reaction in 3D space. Multi-wavelength polymerization was previously used to break the diffraction limit in 2D and semi-3D lithography. We are exploiting this phenomenon to implement a highly parallelized fully-three-dimensional method. Since the multi-wavelength polymerization requires relatively low illumination intensities, a low cost full-field illumination system can be implemented increasing the printing speed by several orders of magnitude. The existing nano- and micro-3D printing methods demonstrated an outstanding potential in rapid prototyping of a wide range of applications ranging from micro-optics to micro-fluidics and bio-scaffolds. We believe that our approach will shift the paradigm of micro-3D printing from prototyping and R&D applications to serial production of final products.
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Alexander Kostenko and Aditya Narayanan "Multi-wavelength volumetric lithography", Proc. SPIE PC12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV, PC120120I (5 March 2022); https://doi.org/10.1117/12.2607196
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KEYWORDS
Lithography
Polymerization
Printing
Lithographic illumination
3D printing
Femtosecond phenomena
Micro optics
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