Femtosecond laser figuring and finishing of glass

Gong Chen; Jie Qiao

doi:10.1117/12.2692574

30 November 2023 Femtosecond laser figuring and finishing of glass

Gong Chen, Jie Qiao

Proceedings Volume PC12778, Optifab 2023; PC1277807 (2023) https://doi.org/10.1117/12.2692574
Event: SPIE Optifab, 2023, Rochester, New York, United States

Abstract

We have demonstrated, for the first time to our knowledge, the simultaneous figuring and finishing of glass substrates using a femtosecond laser. Deterministic material removal with nanometer precision was achieved while maintaining optical surface quality (<1 nm RMS roughness). We have identified a metric that enables high-precision material removal and scaling up the material removal towards larger processing tasks and flexible geometrical features. The controllability of material removal was demonstrated using various laser parameter combinations. Furthermore, we created a four-step staircase structure to demonstrate the highly deterministic figuring and finishing process. The controllable femtosecond laser figuring with optical quality surface demonstrates a novel pathway for precision figuring and finishing of optics.

Conference Presentation

Citation Download Citation

Gong Chen and Jie Qiao "Femtosecond laser figuring and finishing of glass", Proc. SPIE PC12778, Optifab 2023, PC1277807 (30 November 2023); https://doi.org/10.1117/12.2692574

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