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13 March 2024 Femtosecond laser ablation of alternative light absorbers and new selective contacts for photovoltaic devices
David Canteli, Miguel Morales, Carlos Molpeceres, Cristina Muñoz-Garcia, Sergio Vela, Sara Lauzurica, David Muñoz-Martín, Eloi Ros, Pablo Ortega, Juan Miguel López-González, Cristóbal Voz, Ana Luz Muñoz-Rosas, Julián López-Vidrier, José Miguel Asensi, Joan Bertomeu
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Proceedings Volume PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX; PC128720F (2024) https://doi.org/10.1117/12.3003863
Event: SPIE LASE, 2024, San Francisco, California, United States
Abstract
Laser scribing is a promising technology for thin-film ablation in photovoltaic device manufacturing, particularly with non-conventional materials. This study explores copper oxides as alternative light absorbers due to their abundance and safe sourcing. Transition metal oxide (TMO) layers, like molybdenum oxide (MoO3), vanadium oxide (V2O5), and tungsten oxide (WO3), are investigated as selective contacts for advanced semiconductor devices. The research employs a high-powered fs laser (EKSPLA FemtoLux30, 30W, 1030 nm) with tunable pulse lengths (350 fs~1ps) and various wavelengths (1064, 532, and 355 nm) to determine the threshold ablation fluence and achieve optimal thin-film removal without substrate alteration. Diode isolation and electrical characteristics demonstrate the process's high quality.
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David Canteli, Miguel Morales, Carlos Molpeceres, Cristina Muñoz-Garcia, Sergio Vela, Sara Lauzurica, David Muñoz-Martín, Eloi Ros, Pablo Ortega, Juan Miguel López-González, Cristóbal Voz, Ana Luz Muñoz-Rosas, Julián López-Vidrier, José Miguel Asensi, and Joan Bertomeu "Femtosecond laser ablation of alternative light absorbers and new selective contacts for photovoltaic devices", Proc. SPIE PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, PC128720F (13 March 2024); https://doi.org/10.1117/12.3003863
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KEYWORDS
Femtosecond phenomena
Laser ablation
Oxides
Photovoltaics
Pulsed laser operation
Thin film solar cells
Thin films
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