An NBS Physical Standard For The Calibration Of Photomask Linewidth Measuring Systems

Dennis A. Swyt

doi:10.1117/12.956020

28 February 1978 An NBS Physical Standard For The Calibration Of Photomask Linewidth Measuring Systems

Dennis A. Swyt

Proceedings Volume 0129, Effective Utilization of Optics in Quality Assurance I; (1978) https://doi.org/10.1117/12.956020
Event: Effective Utilization of Optics in Quality Assurance, 1977, Arlington Heights, United States

Abstract

In the final stages of development at the National Bureau of Standards (NBS) is a photo-mask-like physical standard for the evaluation and calibration of linewidth-measuring optical microscopes, including those of the automatic, closed-circuit TV types. The standard bears clear and opaque lines in the 1 to 10 micrometer (40 to 400 microinch) range and is applicable to microscopes used to measure the opaque-type, as opposed to "see-through", photomasks in trans-mitted light. Primary calibrations of the standard are done on an electron microscope/laser interferometer system with secondary calibrations done on a high-performance photometric optical microscope. The NBS linewidth standard, having linewidths and linespacings distributed in a special way over the range where serious problems in industrial linewidth measurements occur, can be used to detect systematic errors and the biases within measuring systems which cause them. Given in this paper is a constructed numerical example, based on observed effects, of how use of the standard can reveal a number of different types of systematic errors within a single system and can point to likely sources of biases which cause these errors.

Citation Download Citation

Dennis A. Swyt "An NBS Physical Standard For The Calibration Of Photomask Linewidth Measuring Systems", Proc. SPIE 0129, Effective Utilization of Optics in Quality Assurance I, (28 February 1978); https://doi.org/10.1117/12.956020

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