Mechanical Stresses On Evaporated Chromium Films

R. Berger; H. K. Pulker

doi:10.1117/12.935504

28 November 1983 Mechanical Stresses On Evaporated Chromium Films

R. Berger, H. K. Pulker

Proceedings Volume 0401, Thin Film Technologies I; (1983) https://doi.org/10.1117/12.935504
Event: 1983 International Technical Conference/Europe, 1983, Geneva, Switzerland

Abstract

Measurements were carried out concerning the intrinsic tensile stress of chromium films evaporated onto bare and precoated glass substrates. Additionally the structure and microstructure of the films were investigated. Using these results together with the elastic data of chromium films a quantitative interpretation based on a grain boundary model could be performed.

Citation Download Citation

R. Berger and H. K. Pulker "Mechanical Stresses On Evaporated Chromium Films", Proc. SPIE 0401, Thin Film Technologies I, (28 November 1983); https://doi.org/10.1117/12.935504

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