Laser Microprobe Mass Analysis Of Materials

Robert W. Odom; Charles J. Hitzman

doi:10.1117/12.939409

31 May 1984 Laser Microprobe Mass Analysis Of Materials

Robert W. Odom, Charles J. Hitzman

Proceedings Volume 0458, Applications of Lasers to Industrial Chemistry; (1984) https://doi.org/10.1117/12.939409
Event: 1984 Los Angeles Technical Symposium, 1984, Los Angeles, United States

Abstract

Laser microprobe mass analysis (LMMA) is a relatively new microanalytical technique used in the characterization of materials elemental and molecular composition. The LMMA technique is based on performing a mass and intensity analysis of the ionic components formed during high power density laser irradiation of a materials surface. The micro-analytical characteristic of this materials analysis technique results from utilizing a finely focused (%1.0pm diameter) laser pulse to initiate the vaporization and ionization of the materials constituents. The combination of this finely focused, high power density (variable between %108 to 1012 w/cm2) laser pulse with time-of-flight (TOF) mass analysis techniques provides a complete mass spectrum of the ionization produced during each laser shot and results in elemental detection sensitivities which are in the ppm (atomic) range. This paper presents a discussion of the principles of laser microprobe mass analysis along with a series of applications of the technique in the microanalytical characterization of such materials as metals, insulators, and semiconductor devices.

Citation Download Citation

Robert W. Odom and Charles J. Hitzman "Laser Microprobe Mass Analysis Of Materials", Proc. SPIE 0458, Applications of Lasers to Industrial Chemistry, (31 May 1984); https://doi.org/10.1117/12.939409

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available