Performance Of A Fully Automated Scatterometer For BRDF And BTDF Measurements At Visible And Infrared Wavelengths

Scot Anderson; Stephen M. Pompea; Donald F. Shepard; Raymond Castonauay

doi:10.1117/12.948100

5 April 1989 Performance Of A Fully Automated Scatterometer For BRDF And BTDF Measurements At Visible And Infrared Wavelengths

Scot Anderson, Stephen M. Pompea, Donald F. Shepard, Raymond Castonauay

Author Affiliations +

Proceedings Volume 0967, Stray Light and Contamination in Optical Systems; (1989) https://doi.org/10.1117/12.948100
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

The general performance of the FASCAT (Fully Automated Scatterometer) at Martin Marietta shows that the instrument can make rapid, accurate BRDF (Bidirectional Reflectance Distribution Function) and BTDF (Bidirectional Transmittance Distribution Function) measurements of optical surfaces over a range of approximately ten orders of magnitude (103 to 10-7) in BRDF. These measurements can be made for most surfaces even with the detector at the specular angle because of beam attenuation techniques. Helium-neon and CO, lasers are used as sources in conjunction with a reference detector and chopper. The instrument is controlled by an IBM XT computer, which is also used for data storage. The sample's multiple plane positioning and the detector position angle are controlled by high precision computer driven motor drivers. A gold sample is automatically measured before the sample measurement. An innovative menu system makes the operation of the instrument possible with minimal training.

Citation Download Citation

Scot Anderson, Stephen M. Pompea, Donald F. Shepard, and Raymond Castonauay "Performance Of A Fully Automated Scatterometer For BRDF And BTDF Measurements At Visible And Infrared Wavelengths", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); https://doi.org/10.1117/12.948100

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