A simple phase-shift ESPI for 3D deformation measurement

Ping Sun; Xinghai Wang; Haibin Sun

doi:10.1117/12.2246240

24 November 2016 A simple phase-shift ESPI for 3D deformation measurement

Ping Sun, Xinghai Wang, Haibin Sun

Proceedings Volume 10023, Optical Metrology and Inspection for Industrial Applications IV; 100231U (2016) https://doi.org/10.1117/12.2246240
Event: SPIE/COS Photonics Asia, 2016, Beijing, China

Abstract

A simple setup for 3-D deformation measurement is offered. In the scheme a novel Cube Beam-Splitter, called Non- Cube Beam-Splitter (NCBS), is used for 3-D phase-shift Electronic Speckle Pattern Interferometry (ESPI). By using the NCBS lights from a tested object and lights from a reference surface, the reference and the object light can be combined and then interfere each other on a CCD camera when a laser beam illuminate the test object and the reference surface simultaneously. When three laser beams illuminate the test object at different incident angles respectively before and after deformation, three interference fringe patterns are formed. Then three phase maps corresponding to three lasers can be calculated by using phase-shift, by which three displacement components are completed. The principle of the method is presented and proved by a typical three-point bending experiment. Experimental results are offered.

Citation Download Citation

Ping Sun, Xinghai Wang, and Haibin Sun "A simple phase-shift ESPI for 3D deformation measurement", Proc. SPIE 10023, Optical Metrology and Inspection for Industrial Applications IV, 100231U (24 November 2016); https://doi.org/10.1117/12.2246240

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KEYWORDS

3D metrology

Fringe analysis

Phase shifts

Speckle pattern

Interferometers

Interferometry

Light scattering

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