TEGs as self-sufficient power supply for sensors and microelectromechanical systems

M. Schönhoff; U. Hilleringmann

doi:10.1117/12.2243133

3 February 2017 TEGs as self-sufficient power supply for sensors and microelectromechanical systems

M. Schönhoff, U. Hilleringmann

Proceedings Volume 10036, Fourth Conference on Sensors, MEMS, and Electro-Optic Systems; 100361B (2017) https://doi.org/10.1117/12.2243133
Event: Fourth Conference on Sensors, MEMS and Electro-Optic Systems, 2016, Skukuza, Kruger National Park, South Africa

Abstract

Thermoelectric generators (TEGs) can be used as robust and maintenance-free power supplies. The power density of currently available TEGs is about 1 W/cm² and sufficient for many low power sensor/microelectromechanical systems. By changing the sintering atmosphere and using a special set-up a standard industry process used for insulating or metallic materials was transferred to thermoelectric FeSi₂-, Mg₂Si- and SiGe-material. Thereby, separated compact- and sintering steps allows a mass producible process in contrast to the almost exclusively used SPS- and FAST-processes. All three materials have been further processed to functional TEG-modules by sawing, bonding and electrically contacting with TiSi₂. Thereby, the mechanical bond as well as the electrical contacts are thermally stable up to 800 °C. The general functionality and the characteristics of the final TEG-modules were confirmed by analysis in a measurement setup that simulates an application in a realistic environment.

Citation Download Citation

M. Schönhoff and U. Hilleringmann "TEGs as self-sufficient power supply for sensors and microelectromechanical systems", Proc. SPIE 10036, Fourth Conference on Sensors, MEMS, and Electro-Optic Systems, 100361B (3 February 2017); https://doi.org/10.1117/12.2243133

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