Silicon Microresonator Transducers

Brian Culshaw

doi:10.1117/12.949314

23 February 1989 Silicon Microresonator Transducers

Brian Culshaw

Proceedings Volume 1011, Fiber Optic Sensors III; (1989) https://doi.org/10.1117/12.949314
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Optically energised microresonant transducers offer a potentially simple and precise means for implementing fibre optic measurements. In this paper, the principles of such transducers are briefly reviewed. This is followed by a summary of the experimental data and theoretical insights gained over the past few years in applying such transducers to the measurement of pressure and temperature. Factors such as the condition for self-excitation, the transient responses, materials characteristics and systems implications are briefly discussed, in addition to the direct characterisation of experimental sensors. The paper demonstrates that this approach to fibre optic measurements is compatible with simple remotely energised, relatively high precision measurement applications and, furthermore, that the technique can be readily applied to multiple sensor arrays and systems.

Citation Download Citation

Brian Culshaw "Silicon Microresonator Transducers", Proc. SPIE 1011, Fiber Optic Sensors III, (23 February 1989); https://doi.org/10.1117/12.949314

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