Compact optical MEMS accelerometers and temperature sensors

Branislav Timotijevic; Yves Petremand; Dara Bayat; Markus Luetzelschwab; Laurent Aebi; Maurizio Tormen

doi:10.1117/12.2250345

20 February 2017 Compact optical MEMS accelerometers and temperature sensors

Branislav Timotijevic, Yves Petremand, Dara Bayat, Markus Luetzelschwab, Laurent Aebi, Maurizio Tormen

Proceedings Volume 10116, MOEMS and Miniaturized Systems XVI; 101160G (2017) https://doi.org/10.1117/12.2250345
Event: SPIE OPTO, 2017, San Francisco, California, United States

Abstract

Continuous and accurate monitoring of acceleration and temperature inside large turbo- and hydro-generators is of crucial importance to prevent extremely expensive system damages and false positives. Development of optical, metalfree sensors for such systems has gained a lot of attention due to the fact that they are resistant to typically very strong electromagnetic fields and that they are non-conductive. We present miniature temperature and accelerometer optical sensors using a common silicon MEMS platform. A linear response with a deviation as small as 1% between set and measured accelerations has been obtained in an acceleration range 0-40g. Preliminary tests for temperature sensors indicate a linear response with sensitivity better than 1°C in a range of 20°C to 150°C.

Citation Download Citation

Branislav Timotijevic, Yves Petremand, Dara Bayat, Markus Luetzelschwab, Laurent Aebi, and Maurizio Tormen "Compact optical MEMS accelerometers and temperature sensors", Proc. SPIE 10116, MOEMS and Miniaturized Systems XVI, 101160G (20 February 2017); https://doi.org/10.1117/12.2250345

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