Waveguide silicon nitride grating coupler

Jan Litvik; Ivan Dolnak; Milan Dado

doi:10.1117/12.2263183

23 December 2016 Waveguide silicon nitride grating coupler

Jan Litvik, Ivan Dolnak, Milan Dado

Proceedings Volume 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics; 1014213 (2016) https://doi.org/10.1117/12.2263183
Event: 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 2016, Jasna, Slovakia

Abstract

Grating couplers are one of the most used elements for coupling of light between optical fibers and photonic integrated components. Silicon–on–insulator platform provides strong confinement of light and allows high integration. In this work, using simulations we have designed a broadband silicon nitride surface grating coupler. The Fourier–eigenmode expansion and finite difference time domain methods are utilized in design optimization of grating coupler structure. The fully, single etch step grating coupler is based on a standard silicon–on–insulator wafer with 0.55 μm waveguide Si3N4 layer. The optimized structure at 1550 nm wavelength yields a peak coupling efficiency –2.6635 dB (54.16%) with a 1–dB bandwidth up to 80 nm. It is promising way for low-cost fabrication using complementary metal–oxide– semiconductor fabrication process.

Citation Download Citation

Jan Litvik, Ivan Dolnak, and Milan Dado "Waveguide silicon nitride grating coupler", Proc. SPIE 10142, 20th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics, 1014213 (23 December 2016); https://doi.org/10.1117/12.2263183

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