Development of mass production technology for block copolymer lithographic materials

Toshiyuki Himi; Ryota Matsuki; Terumasa Kosaka; Ryosuke Ogaki; Yukio Kawaguchi; Tetsuo Shimizu

doi:10.1117/12.2258167

27 March 2017 Development of mass production technology for block copolymer lithographic materials

Toshiyuki Himi, Ryota Matsuki, Terumasa Kosaka, Ryosuke Ogaki, Yukio Kawaguchi, Tetsuo Shimizu

Proceedings Volume 10146, Advances in Patterning Materials and Processes XXXIV; 101461Z (2017) https://doi.org/10.1117/12.2258167
Event: SPIE Advanced Lithography, 2017, San Jose, California, United States

Abstract

We have successfully synthesized various and over wide range molecular weight block copolymers (BCPs): these are polystyrene(PS)-polymethylmethacrylate(PMMA) as general components and poly(4-trimethylsilylstyrene)(PTMSS)- poly(4-hydroxystyrene)(PHS) system as very strong segregated components (high chi) and multiblock type of those copolymers which form the microphase-separated structure pattern using living anionic polymerizing method by which the size of polymer can be precisely controlled. In addition, we were able to observe alternating lamellar and cylinder structures which were formed by our various BCPs using small angle X-ray scattering (SAXS). Moreover, we have successfully developed new apparatus for high volume manufacturing including our original technologies such as purification of monomer, improvement of wetted surface, and mechanical technology for high vacuum. And we have successfully synthesized all the BCPs with narrow molecular weight distribution (PDI <1.1) with large-scale apparatus.

Citation Download Citation

Toshiyuki Himi, Ryota Matsuki, Terumasa Kosaka, Ryosuke Ogaki, Yukio Kawaguchi, and Tetsuo Shimizu "Development of mass production technology for block copolymer lithographic materials", Proc. SPIE 10146, Advances in Patterning Materials and Processes XXXIV, 101461Z (27 March 2017); https://doi.org/10.1117/12.2258167

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available