Excimer Lasers For Material Processing: Results And Industrial Applications

H.-J. Kahlert; U. Sowada; D. Basting

doi:10.1117/12.950146

26 April 1989 Excimer Lasers For Material Processing: Results And Industrial Applications

H.-J. Kahlert, U. Sowada, D. Basting

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950146
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Excimer laser material processing of technical parts leads to results which, in many cases, differ strongly from previously known effects. This paper is a review on processing of metals, plastics, glass, ceramics, and compound materials. Since the effect of radiation is determined by beam parameters, beam handling will be described as well. Starting with the beam properties of interest, the technique and results of excimer laser processing will be summarized.

Citation Download Citation

H.-J. Kahlert, U. Sowada, and D. Basting "Excimer Lasers For Material Processing: Results And Industrial Applications", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950146

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available