High Efficiency Switchless Operation Of A 0.5 J UV Preionized Excimer Laser

Didier Beaupere; Claude Gagnol; Michel Huguet; Bernard Lacour; Annick Lavenant; Pierre Pinson

doi:10.1117/12.950121

26 April 1989 High Efficiency Switchless Operation Of A 0.5 J UV Preionized Excimer Laser

Didier Beaupere, Claude Gagnol, Michel Huguet, Bernard Lacour, Annick Lavenant, Pierre Pinson

Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950121
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Operation of the discharge excimer laser in the "switchless" mode offers an interesting opportunity for high average power industrial excimer laser design. Its potential for high efficiency, energy and repetition rate has been recently investigated and fullfills early expectations. When properly used, U.V. corona preionization still remains attractive for active volumes below one liter and must be taken into account among the various trade off for future products in the 1kW average power range.

Citation Download Citation

Didier Beaupere, Claude Gagnol, Michel Huguet, Bernard Lacour, Annick Lavenant, and Pierre Pinson "High Efficiency Switchless Operation Of A 0.5 J UV Preionized Excimer Laser", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950121

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