Analysis and design of bridge structure for a micro Fabry-Perot cavity

Yuanyuan Li; Qinghua Meng; Sihai Chen; Yuming Dong

doi:10.1117/12.2268130

8 March 2017 Analysis and design of bridge structure for a micro Fabry-Perot cavity

Yuanyuan Li, Qinghua Meng, Sihai Chen, Yuming Dong

Proceedings Volume 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016; 1025542 (2017) https://doi.org/10.1117/12.2268130
Event: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 2016, Jinhua, Suzhou, Chengdu, Xi'an, Wuxi, China

Abstract

Abstract—This paper describes a MEMS-based tunable Fabry-Perot filter that can be directly integrated on a detector. The Fabry-Perot filter consists of two parallel mirrors and lets the light with particular wavelength pass through. The wavelength depends on the gap between the mirrors. The gap of the micromechanical Fabry-Perot filter can be changed by applying a voltage to the mirrors, an electrostatic force inducing an attraction between the substrate and the top mirror. Based on the comprehensive analysis of the working principle of the micro F-P cavity filter, the optimum tuning scheme of micro F-P cavity filter is established. A simulation of the mechanical behavior was performed based on finite elements, using ANSYS software. We finally establish the L-arm type cantilever to support cavity structure, the micro-bridge can achieve a considerable range of tuning; relatively high fill factor, filter light leakage is avoided; the high abilityto keep parallel can achieve high precision filtering effect; structural stability, it can resist the residual stress of manufacture. This MEMS F-P tunable filter can be a potential application in spectroscopic sensing and optical communication system.

Citation Download Citation

Yuanyuan Li, Qinghua Meng, Sihai Chen, and Yuming Dong "Analysis and design of bridge structure for a micro Fabry-Perot cavity", Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 1025542 (8 March 2017); https://doi.org/10.1117/12.2268130

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