Design and fabrication of deformable mirror driven by piezoelectric buzzer array

Lei Tian; Zhengxiong Zhu; Jialian Zhang; Jianqiang Ma

doi:10.1117/12.2267774

8 March 2017 Design and fabrication of deformable mirror driven by piezoelectric buzzer array

Lei Tian, Zhengxiong Zhu, Jialian Zhang, Jianqiang Ma

Proceedings Volume 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016; 102555F (2017) https://doi.org/10.1117/12.2267774
Event: Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 2016, Jinhua, Suzhou, Chengdu, Xi'an, Wuxi, China

Abstract

A low-cost deformable mirror (DM) driven by an underlying piezoelectric buzzer array though connection struts is proposed. Piezoelectric buzzer is a very low cost device that is easily commercial available. A numerical model of piezoelectric buzzer was built to predict the displacement of the actuator. The fabrication process without complicated technology was developed. Finally, a DM with 19 actuators arranged hexagonally was fabricated.

Citation Download Citation

Lei Tian, Zhengxiong Zhu, Jialian Zhang, and Jianqiang Ma "Design and fabrication of deformable mirror driven by piezoelectric buzzer array", Proc. SPIE 10255, Selected Papers of the Chinese Society for Optical Engineering Conferences held October and November 2016, 102555F (8 March 2017); https://doi.org/10.1117/12.2267774

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available