Confocal Interference Microscopy

Colin J.R Sheppard; Douglas K. Hamilton; Hubert J. Matthews

doi:10.1117/12.950317

9 February 1989 Confocal Interference Microscopy

Colin J.R Sheppard, Douglas K. Hamilton, Hubert J. Matthews

Proceedings Volume 1028, Scanning Imaging; (1989) https://doi.org/10.1117/12.950317
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany

Abstract

Confocal imaging is a coherent technique so that the amplitude and phase information can be extracted using interference techniques. A confocal interference microscope has been constructed based on a Michaelson interferometer. Phase changes of 25 mrad., corresponding to height changes of 1 nm. can be detected. The interferometer can be used to measure surface profiles, and also to measure aberrations in the optical system.

Citation Download Citation

Colin J.R Sheppard, Douglas K. Hamilton, and Hubert J. Matthews "Confocal Interference Microscopy", Proc. SPIE 1028, Scanning Imaging, (9 February 1989); https://doi.org/10.1117/12.950317

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