Core level spectroscopy for surface analysis

Franz J. Himpsel; R. Treusch; I. Jimenez; Alan F. Jankowski; D. G. J. Sutherland; L. J. Terminello; C. Heske; Rupert C. C. Perera; D. K. Shuh; William M. Tong; James H. Underwood; J. A. Carlisle; T. A. Callcott; Jian Jun Jia; David L. Ederer; Dieter M. Gruen; Alan R. Krauss; D. C. Zuiker; Gary L. Doll

doi:10.1117/12.279846

30 July 1997 Core level spectroscopy for surface analysis

Franz J. Himpsel, R. Treusch, I. Jimenez, Alan F. Jankowski, D. G. J. Sutherland, L. J. Terminello, C. Heske, Rupert C. C. Perera, D. K. Shuh, William M. Tong, James H. Underwood, J. A. Carlisle, T. A. Callcott, Jian Jun Jia, David L. Ederer, Dieter M. Gruen, Alan R. Krauss, D. C. Zuiker, Gary L. Doll

Author Affiliations +

Proceedings Volume 10291, Materials Characterization and Optical Probe Techniques: A Critical Review; 102910J (1997) https://doi.org/10.1117/12.279846
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

This is a review of the applications that various core level spectroscopies have in surface analysis. Three methods are highlighted, i.e., photoelectron spectroscopy of core level shifts (XPS or ESCA), absorption spectroscopy, and soft X-ray fluorescence. These techniques provide not only elemental analysis at surfaces, but also the chemical state of atoms and molecules in the outermost atomic layers, such as oxidation state, hybridization, and nearest neighbor bonding information. The probing depth can be adjusted in non-destructive fashion from 3 A to 300 A by detecting electrons or photons of variable energies. Advances in detectors and light sources, such as synchrotron radiation, are breaking ground for new applications, such as chemically-resolved microscopy.

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Franz J. Himpsel, R. Treusch, I. Jimenez, Alan F. Jankowski, D. G. J. Sutherland, L. J. Terminello, C. Heske, Rupert C. C. Perera, D. K. Shuh, William M. Tong, James H. Underwood, J. A. Carlisle, T. A. Callcott, Jian Jun Jia, David L. Ederer, Dieter M. Gruen, Alan R. Krauss, D. C. Zuiker, and Gary L. Doll "Core level spectroscopy for surface analysis", Proc. SPIE 10291, Materials Characterization and Optical Probe Techniques: A Critical Review, 102910J (30 July 1997); https://doi.org/10.1117/12.279846

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