Highest precision centering error measurement

J. Heinisch; E. Dumitrescu; S. Krey

doi:10.1117/12.719697

14 May 2007 Highest precision centering error measurement

J. Heinisch, E. Dumitrescu, S. Krey

Proceedings Volume 10316, Optifab 2007: Technical Digest; 1031610 (2007) https://doi.org/10.1117/12.719697
Event: Optifab 2007, 2007, Rochester, New York, United States

Abstract

The optical imaging quality of objectives is mainly influenced by the errors of the mechanical alignment of the single elements. TRIOPTICS has developed a new technology called MultiLens® in order to measure the centering error of single lenses as well as complete objectives. It is possible to measure the tilt of each single optical surface inside of a mounted objective with highest precision. We achieve accuracies in the range of an arc second. During the measurement the deviation of each centre of curvature with respect to a reference axis is measured. These data are further processed in order to provide the shift and tilt of an individual lens or group of lenses with respect to a given reference axis. The knowledge of the centering error can be used to align actively single optical elements. Applications mainly include the measurement of cell phone and digital camera lenses. However, any type of objective lens from endoscope up to very complex objective lenses used in microlithography can be measured with highest accuracy.

Citation Download Citation

J. Heinisch, E. Dumitrescu, and S. Krey "Highest precision centering error measurement", Proc. SPIE 10316, Optifab 2007: Technical Digest, 1031610 (14 May 2007); https://doi.org/10.1117/12.719697

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