Subpixel edge estimation with lens aberrations compensation based on the iterative image approximation for high-precision thermal expansion measurements of solids

F. M. Inochkin; S. K. Kruglov; I. G. Bronshtein; T. A. Kompan; S. V. Kondratjev; A. S. Korenev; N. F. Pukhov

doi:10.1117/12.2270204

26 June 2017 Subpixel edge estimation with lens aberrations compensation based on the iterative image approximation for high-precision thermal expansion measurements of solids

F. M. Inochkin, S. K. Kruglov, I. G. Bronshtein, T. A. Kompan, S. V. Kondratjev, A. S. Korenev, N. F. Pukhov

Author Affiliations +

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 1032926 (2017) https://doi.org/10.1117/12.2270204
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

A new method for precise subpixel edge estimation is presented. The principle of the method is the iterative image approximation in 2D with subpixel accuracy until the appropriate simulated is found, matching the simulated and acquired images. A numerical image model is presented consisting of three parts: an edge model, object and background brightness distribution model, lens aberrations model including diffraction. The optimal values of model parameters are determined by means of conjugate-gradient numerical optimization of a merit function corresponding to the L2 distance between acquired and simulated images. Computationally-effective procedure for the merit function calculation along with sufficient gradient approximation is described. Subpixel-accuracy image simulation is performed in a Fourier domain with theoretically unlimited precision of edge points location. The method is capable of compensating lens aberrations and obtaining the edge information with increased resolution. Experimental method verification with digital micromirror device applied to physically simulate an object with known edge geometry is shown. Experimental results for various high-temperature materials within the temperature range of 1000°C..2400°C are presented.

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F. M. Inochkin, S. K. Kruglov, I. G. Bronshtein, T. A. Kompan, S. V. Kondratjev, A. S. Korenev, and N. F. Pukhov "Subpixel edge estimation with lens aberrations compensation based on the iterative image approximation for high-precision thermal expansion measurements of solids", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 1032926 (26 June 2017); https://doi.org/10.1117/12.2270204

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