Investigations on laser ablation mechanism of anti-reflection layers for solar cells

Wenwen Liu; Yu Cao; Jian Zhang; Dehua Zhu

doi:10.1117/12.2269681

1 August 2017 Investigations on laser ablation mechanism of anti-reflection layers for solar cells

Wenwen Liu, Yu Cao, Jian Zhang, Dehua Zhu

Proceedings Volume 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers; 103391N (2017) https://doi.org/10.1117/12.2269681
Event: Pacific Rim Laser Damage 2017: Optical Materials for High Power Lasers, 2017, Shanghai, China

Abstract

Laser processes of crystalline silicon solar cells become increasingly attractive, because they are fast, accurate and contact-free. Nanosecond and picosecond laser ablations with wavelength of 532nm were performed on the anti-reflection layers deposited on silicon. The laser ablated grooves of AR coatings on monocrystalline and polycrystalline silicon were both characterized to verify the influence on the underlying silicon. And the threshold fluences were specified by contrasting with the corresponding performances under certain laser pulse duration. More importantly, the groove edges were analyzed to further expose the laser ablation mechanism under different laser pulse durations.

Citation Download Citation

Wenwen Liu, Yu Cao, Jian Zhang, and Dehua Zhu "Investigations on laser ablation mechanism of anti-reflection layers for solar cells", Proc. SPIE 10339, Pacific Rim Laser Damage 2017: Optical Materials for High-Power Lasers, 103391N (1 August 2017); https://doi.org/10.1117/12.2269681

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