Automated Dimensional Analysis Using A Light-Sectioning Microscope

John Loomis; Allan Lightman; Allen Poe; Roger Caldwell

doi:10.1117/12.950976

1 May 1989 Automated Dimensional Analysis Using A Light-Sectioning Microscope

John Loomis, Allan Lightman, Allen Poe, Roger Caldwell

Proceedings Volume 1036, Precision Instrument Design; (1989) https://doi.org/10.1117/12.950976
Event: SPIE Advanced Processing Technologies for Optical and Electronic Devices (colocated wth OPTCON), 1988, Santa Clara, CA, United States

Abstract

A computer vision system has been integrated with a modified light-sectioning microscope for the quality control and inspection of a machined part whose critical dimensions are in the range of 30 to 300 μm. Height measurements were determined by analysis of the projected light-section line. Transverse measurements were made using the microscope in a traditional configuration with illumination from selected elements of an external LED ring array. The light section irradiance was under computer control to accommodate the spatial variations in surface reflectance whose dynamic range exceeded that of the vision system. Part features are located by the vision system. Edges and line centers are then measured to sub-pixel resolution with a gray-level analysis algorithm. This paper describes the design and operation of this system. Details of the measurement process and analysis algorithms are provided.

Citation Download Citation

John Loomis, Allan Lightman, Allen Poe, and Roger Caldwell "Automated Dimensional Analysis Using A Light-Sectioning Microscope", Proc. SPIE 1036, Precision Instrument Design, (1 May 1989); https://doi.org/10.1117/12.950976

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