A portable device for calibration of autocollimators with nanoradian precision

Tanfer Yandayan

doi:10.1117/12.2274178

7 September 2017 A portable device for calibration of autocollimators with nanoradian precision

Tanfer Yandayan

Proceedings Volume 10385, Advances in Metrology for X-Ray and EUV Optics VII; 103850B (2017) https://doi.org/10.1117/12.2274178
Event: SPIE Optical Engineering + Applications, 2017, San Diego, California, United States

Abstract

A portable device has been developed in TUBITAK UME to calibrate high precision autocollimators with nanoradian precision. The device can operate in the range of ±4500" which is far enough for the calibration of the available autocollimators and can generate ultra-small angles in measurement steps of 0.0005" (2.5 nrad). Description of the device with the performance tests using the calibrated precise autocollimators and novel methods will be reported. The test results indicate that the device is a good candidate for application to on-site/in-situ calibration of autocollimators with expanded uncertainties of 0.01" (50 nrad) particularly those used in slope measuring profilers.

Citation Download Citation

Tanfer Yandayan "A portable device for calibration of autocollimators with nanoradian precision", Proc. SPIE 10385, Advances in Metrology for X-Ray and EUV Optics VII, 103850B (7 September 2017); https://doi.org/10.1117/12.2274178

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available