High-numerical-aperture sphericity measurement based on stitching interferometry

Kebing Mou; Xin Wu; Yingjie Yu

doi:10.1117/12.2271175

13 June 2017 High-numerical-aperture sphericity measurement based on stitching interferometry

Kebing Mou, Xin Wu, Yingjie Yu

Proceedings Volume 10449, Fifth International Conference on Optical and Photonics Engineering; 104493A (2017) https://doi.org/10.1117/12.2271175
Event: Fifth International Conference on Optical and Photonics Engineering, 2017, Singapore, Singapore

Abstract

High precision optical components with large numerical aperture are widely used in industrial products. The stitching interferometry system was designed to measure high-numerical-aperture sphericity and extended the measurement range of interferometry. Firstly, sub-aperture stitching model and experimental system were analyzed. Adjustment mechanism with seven degrees of freedom was built to keep spherical surface in the null position. Then, optical path difference caused by adjustment errors was described by mathematical model. The misalignment aberrations in measurement result were removed after fitted by the Zernike polynomial and the accurate surface shape of single aperture is gained. Finally, a high-numerical-aperture sphericity was measured by the error homogenization algorithm. The PV and RMS are consistent with the results of full aperture testing.

Citation Download Citation

Kebing Mou, Xin Wu, and Yingjie Yu "High-numerical-aperture sphericity measurement based on stitching interferometry", Proc. SPIE 10449, Fifth International Conference on Optical and Photonics Engineering, 104493A (13 June 2017); https://doi.org/10.1117/12.2271175

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