Wrinkle formation analysis in extreme-ultraviolet pellicle

Hae-Nam Jeong; Guk-Jin Kim; Sung-Gyu Lee; Hye-Keun Oh

doi:10.1117/12.2281036

26 October 2017 Wrinkle formation analysis in extreme-ultraviolet pellicle

Hae-Nam Jeong, Guk-Jin Kim, Sung-Gyu Lee, Hye-Keun Oh

Proceedings Volume 10450, International Conference on Extreme Ultraviolet Lithography 2017; 104501Q (2017) https://doi.org/10.1117/12.2281036
Event: SPIE Photomask Technology and EUV Lithography, 2017, Monterey, California, United States

Abstract

In EUV lithography, one of problems is defect control, so that the EUV pellicle is required to protect EUV mask from contaminations. The EUV pellicle should be extremely thin thickness and it is easy to be deformed as wrinkle and deflection during the manufacturing and exposure process due to structural problems. The deformation can change a transmission of EUV pellicle. The variation in transmission induces the CD variation on the wafer. In this study, various structures for EUV pellicle were considered and non-uniform and uniform wrinkles caused by mechanical deformation were calculated. Even very small wrinkles are amplified by acceleration and even if just deflected pellicle produce the wrinkles.

Citation Download Citation

Hae-Nam Jeong, Guk-Jin Kim, Sung-Gyu Lee, and Hye-Keun Oh "Wrinkle formation analysis in extreme-ultraviolet pellicle", Proc. SPIE 10450, International Conference on Extreme Ultraviolet Lithography 2017, 104501Q (26 October 2017); https://doi.org/10.1117/12.2281036

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available