Improvement of conversion efficiency of DUV light generation at 221-nm using CLBO crystal

Hironori Igarashi; Zhigang Zhao; Hongwen Xuan; Chen Qu; Shinji Ito; Yuki Tamaru; Mitsuru Tamiya; Taisuke Miura; Junichi Fujimoto; Hakaru Mizoguchi; Yohei Kobayashi

doi:10.1117/12.2287675

15 February 2018 Improvement of conversion efficiency of DUV light generation at 221-nm using CLBO crystal

Hironori Igarashi, Zhigang Zhao, Hongwen Xuan, Chen Qu, Shinji Ito, Yuki Tamaru, Mitsuru Tamiya, Taisuke Miura, Junichi Fujimoto, Hakaru Mizoguchi, Yohei Kobayashi

Author Affiliations +

Proceedings Volume 10516, Nonlinear Frequency Generation and Conversion: Materials and Devices XVII; 1051602 (2018) https://doi.org/10.1117/12.2287675
Event: SPIE LASE, 2018, San Francisco, California, United States

Abstract

We are developing a 100-W level DUV light source using a solid-state seed laser and an ArF amplifier. Seed pulse at 193nm is generated by the sum frequency mixing of the pulse at 221nm and the pulse at 1553nm using CLBO crystals. To realize a compact and robust seed laser, we improved the conversion efficiency of DUV light generation. In case of the 221nm pulse generation, the conversion efficiency was increased from 22% to nearly 50% by optimizing the conversion process which enables the reduction of amplifier unit of fundamental light source to obtain the 1W seed pulse at 193nm.

Conference Presentation

Citation Download Citation

Hironori Igarashi, Zhigang Zhao, Hongwen Xuan, Chen Qu, Shinji Ito, Yuki Tamaru, Mitsuru Tamiya, Taisuke Miura, Junichi Fujimoto, Hakaru Mizoguchi, and Yohei Kobayashi "Improvement of conversion efficiency of DUV light generation at 221-nm using CLBO crystal", Proc. SPIE 10516, Nonlinear Frequency Generation and Conversion: Materials and Devices XVII, 1051602 (15 February 2018); https://doi.org/10.1117/12.2287675

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