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14 March 2018 Polarity control in III-nitrides: new insights into an old problem (Conference Presentation)
Martin Albrecht, Natalia Stolyarchuk D.D.S., Stefan Mohn, Toni Markurt, Ronny Kirste, Ramon Collazo, Aimeric Courville, Zlatko Sitar, Philippe Vennéguès
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Proceedings Volume 10532, Gallium Nitride Materials and Devices XIII; 105320C (2018) https://doi.org/10.1117/12.2291849
Event: SPIE OPTO, 2018, San Francisco, California, United States
Abstract
Controlling the polarity of polar semiconductors on nonpolar substrates offers a wealth of device concepts in the form of heteropolar junctions. A key to realize such structures is an appropriate buffer-layer design that, in the past, has been developed by empiricism. Understanding the basic processes that mediate polarity, however, is still an unsolved problem. We present results on the structure of buffer layers for group-III nitrides on sapphire by transmission electron microscopy. We show that it is the conversion of the sapphire surface into a rhombohedral aluminum-oxynitride layer that converts the initial N-polar surface to Al polarity. With the various AlxOyNz phases of the pseudobinary Al2O3-AlN system and their tolerance against intrinsic defects, typical for oxides, a smooth transition between the octahedrally coordinated Al in the sapphire and the tetrahedrally coordinated Al in AlN becomes feasible. Based on these results, we discuss the consequences for achieving either polarity and shed light on widely applied concepts in the field of group-III nitrides like nitridation and low-temperature buffer layers.
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Martin Albrecht, Natalia Stolyarchuk D.D.S., Stefan Mohn, Toni Markurt, Ronny Kirste, Ramon Collazo, Aimeric Courville, Zlatko Sitar, and Philippe Vennéguès "Polarity control in III-nitrides: new insights into an old problem (Conference Presentation)", Proc. SPIE 10532, Gallium Nitride Materials and Devices XIII, 105320C (14 March 2018); https://doi.org/10.1117/12.2291849
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KEYWORDS
Aluminum
Sapphire
Transmission electron microscopy
Aluminum nitride
Nanostructures
Oxides
Oxygen
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