Two-dimensional beam steering device using double periodic Si photonic crystal waveguide

Hiroshi Abe; Moe Takeuchi; Goro Takeuchi; Hiroyuki Ito; Tomoki Yokokawa; Keisuke Kondo; Yuya Furukado; Toshihiko Baba

doi:10.1117/12.2290954

23 March 2018 Two-dimensional beam steering device using double periodic Si photonic crystal waveguide

Hiroshi Abe, Moe Takeuchi, Goro Takeuchi, Hiroyuki Ito, Tomoki Yokokawa, Keisuke Kondo, Yuya Furukado, Toshihiko Baba

Proceedings Volume 10541, Photonic and Phononic Properties of Engineered Nanostructures VIII; 105410P (2018) https://doi.org/10.1117/12.2290954
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

We demonstrate a non-mechanical on-chip optical beam steering device using the photonic crystal waveguide with a double periodic structure that repeats the increase and decrease of hole diameter. Guided slow light in this waveguide is radiated to be a light beam. Slow light shows strong dispersion, which allows a deflection angle of approximately 10 times that of a normal diffraction grating. We fabricated the device using complementary metal oxide semiconductor process and observed a beam deflection angle of 24° in the longitudinal direction with maintaining the divergence angle of 0.3° when the wavelength was changed by 27 nm. Four such waveguides were integrated, and one of them was selected by a Mach-Zehnder optical switch. Then, the lateral beam steering was obtained when a cylindrical lens was placed above these waveguides. By combining the longitudinal and lateral beam steering, the collimated beam was scanned two-dimensionally with 80 × 4 resolution points.

Citation Download Citation

Hiroshi Abe, Moe Takeuchi, Goro Takeuchi, Hiroyuki Ito, Tomoki Yokokawa, Keisuke Kondo, Yuya Furukado, and Toshihiko Baba "Two-dimensional beam steering device using double periodic Si photonic crystal waveguide", Proc. SPIE 10541, Photonic and Phononic Properties of Engineered Nanostructures VIII, 105410P (23 March 2018); https://doi.org/10.1117/12.2290954

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KEYWORDS

Waveguides

Beam steering

Silicon

Slow light

Photonic crystals

Silicon photonics

Dispersion

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