A low-cost 25-actuator electrostatic deformable mirror with polyimide membrane for adaptive optics microscopy

Kaustubh Banerjee; Pouya Rajaeipour; Çağlar Ataman; Hans Zappe

doi:10.1117/12.2288780

22 February 2018 A low-cost 25-actuator electrostatic deformable mirror with polyimide membrane for adaptive optics microscopy

Kaustubh Banerjee, Pouya Rajaeipour, Çağlar Ataman, Hans Zappe

Author Affiliations +

Proceedings Volume 10545, MOEMS and Miniaturized Systems XVII; 105450G (2018) https://doi.org/10.1117/12.2288780
Event: SPIE OPTO, 2018, San Francisco, California, United States

Abstract

A low-cost, compact electrostatic deformable mirror is developed using widely available polymeric materials. The fabrication method offers exceptional post-fabrication mirror flatness error of < 250 nm RMS, which can be reduced below 22 nm at best-flat. A custom real-time control system is also constructed and high fidelity reconstruction of Zernike modes up to the 4^th radial order is presented. Real-time wavefront correction is also demonstrated using a spatial-carrier laser interferometer as a wavefront sensor.

Citation Download Citation

Kaustubh Banerjee, Pouya Rajaeipour, Çağlar Ataman, and Hans Zappe "A low-cost 25-actuator electrostatic deformable mirror with polyimide membrane for adaptive optics microscopy", Proc. SPIE 10545, MOEMS and Miniaturized Systems XVII, 105450G (22 February 2018); https://doi.org/10.1117/12.2288780

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