Improved airborne molecular contaminant filter performance for photolithography

Gerald Weineck; Brian Hoang; Joshua Lais

doi:10.1117/12.2297034

13 March 2018 Improved airborne molecular contaminant filter performance for photolithography

Gerald Weineck, Brian Hoang, Joshua Lais

Proceedings Volume 10586, Advances in Patterning Materials and Processes XXXV; 105861A (2018) https://doi.org/10.1117/12.2297034
Event: SPIE Advanced Lithography, 2018, San Jose, California, United States

Abstract

Airborne molecular contaminants continue to pose cost of ownership challenges in photolithography. Recent advances in understanding siloxane removal have led to the development of an innovative filtration configuration utilizing new media that works in concert to increase overall filter life for acids, bases and silicon containing organic contaminants. This paper examines accelerated testing results, for these state-of-the-art filtration assemblies versus legacy products, to demonstrate improved system performance. The state-of-the-art filtration assemblies have been evaluated in production semiconductor fabs and have shown favorable performance.

Citation Download Citation

Gerald Weineck, Brian Hoang, and Joshua Lais "Improved airborne molecular contaminant filter performance for photolithography", Proc. SPIE 10586, Advances in Patterning Materials and Processes XXXV, 105861A (13 March 2018); https://doi.org/10.1117/12.2297034

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available