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18 September 2018 Testing of soft X-ray and EUV grazing incidence optics using compact laser plasma light sources (Conference Presentation)
Henryk Fiedorowicz, Andrzej Bartnik, Przemyslaw Wachulak
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Proceedings Volume 10760, Advances in X-Ray/EUV Optics and Components XIII; 1076004 (2018) https://doi.org/10.1117/12.2321438
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States
Abstract
In this paper application of laser plasma light sources for testing grazing incidence soft X-ray and EUV optics is presented. The sources are based on laser plasmas produced by irradiation of a gas puff target with nanosecond laser pulses at intensities in the interaction region of about 1011-1014 Wcm-2. The laser pulses are generated using commercially available Nd:YAG lasers generating 4 ns pulses with energy of about 0.8 J or pulses with time duration of 1 ns or 10 ns and energy up to 10 J at 10 Hz repetition rate. The targets are formed by pulsed injection of working gas (Xe, Kr, Ar or their mixtures) in an additional annular stream of He gas under high-pressure using a double-nozzle set up (the double-stream gas puff target approach). Spectral and spatial characteristics of radiation emitted from the sources have been measured. The sources were used to test different grazing incidence optical systems for soft X-ray and EUV spectral ranges, including an axisymmetric ellipsoidal mirror, a pair of axisymmetric paraboloid mirror, a Wolter-type hyperboloid/ellipsoid mirror and a multi-foil “lobster eye” mirror. Results of the metrology studies of these optical systems are presented.
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Henryk Fiedorowicz, Andrzej Bartnik, and Przemyslaw Wachulak "Testing of soft X-ray and EUV grazing incidence optics using compact laser plasma light sources (Conference Presentation)", Proc. SPIE 10760, Advances in X-Ray/EUV Optics and Components XIII, 1076004 (18 September 2018); https://doi.org/10.1117/12.2321438
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KEYWORDS
Laser optics
Grazing incidence
Plasma
X-rays
EUV optics
Extreme ultraviolet
Light sources
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