Nanoscale planar ring-shaped matrix field emitters based on multilayer graphene/SiC

I. L. Jityaev; A. M. Svetlichnyi; O. A. Ageev; E. Yu. Gusev

doi:10.1117/12.2522434

15 March 2019 Nanoscale planar ring-shaped matrix field emitters based on multilayer graphene/SiC

I. L. Jityaev, A. M. Svetlichnyi, O. A. Ageev, E. Yu. Gusev

Proceedings Volume 11022, International Conference on Micro- and Nano-Electronics 2018; 1102209 (2019) https://doi.org/10.1117/12.2522434
Event: The International Conference on Micro- and Nano-Electronics 2018, 2018, Zvenigorod, Russian Federation

Abstract

In this paper we investigated a planar field emission cell with a multiemitter cathode. Multilayer graphene on silicon carbide was used as the material of the field emission cell. The simulation of the electric field distribution in the nanoscale interelectrode gap of the field emission cell was carried out. The use of a planar multiemitter cathode on a flat base leads to inhomogeneity of the electric field strength at the tops of the tips. The electric field strength at the tops increases in the direction from the center to the edge. A design with a disk anode and a surrounding multiemitter cathode is proposed. The uniform distribution of the tips along the perimeter of the cathode contributed to the exclusion of the screening effect. The proposed design makes it possible to reduce the distance between the tips in the matrix cathode while maintaining the uniform electric field strength on the tops.

Citation Download Citation

I. L. Jityaev, A. M. Svetlichnyi, O. A. Ageev, and E. Yu. Gusev "Nanoscale planar ring-shaped matrix field emitters based on multilayer graphene/SiC", Proc. SPIE 11022, International Conference on Micro- and Nano-Electronics 2018, 1102209 (15 March 2019); https://doi.org/10.1117/12.2522434

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KEYWORDS

Graphene

Silicon carbide

Multilayers

Ion beams

Nanotechnology

Etching

Nanostructures

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