Presentation + Paper
24 April 2019 Nanofocus characterization at the Coherent X-ray Imaging instrument using 2D single grating interferometry
Matthew H. Seaberg, Andrew Aquila, Mengning Liang, Hae Ja Lee, Bob Nagler, Yanwei Liu, Anne Sakdinawat, Frank Seiboth, Mikako Makita, Yanwen Sun, Riccardo Signorato, Sergio Carbajo, Yiping Feng, Jacek Krzywinski, Diling Zhu, Sébastien Boutet
Author Affiliations +
Abstract
In this work we present the application of a 2D single grating wavefront sensor to align and characterize the 100 nm focus at the Coherent X-ray Imaging (CXI) endstation at the Linac Coherent Light Source (LCLS). The results agree well with a model of the system, indicating that the mirrors perform as designed when alignment is optimized. In addition, a comparison with the imprint technique confirms the validity of the results, which showed that wavefront-based alignment resulted in negligible astigmatism. Analysis of the retrieved focus profile indicates that intensities <1021 W=cm2 are achievable with currently available LCLS beam parameters and optimal mirror alignment.
Conference Presentation
© (2019) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthew H. Seaberg, Andrew Aquila, Mengning Liang, Hae Ja Lee, Bob Nagler, Yanwei Liu, Anne Sakdinawat, Frank Seiboth, Mikako Makita, Yanwen Sun, Riccardo Signorato, Sergio Carbajo, Yiping Feng, Jacek Krzywinski, Diling Zhu, and Sébastien Boutet "Nanofocus characterization at the Coherent X-ray Imaging instrument using 2D single grating interferometry", Proc. SPIE 11038, X-Ray Free-Electron Lasers: Advances in Source Development and Instrumentation V, 110380L (24 April 2019); https://doi.org/10.1117/12.2526647
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Cited by 1 scholarly publication.
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KEYWORDS
Mirrors

Scanning electron microscopy

Monochromatic aberrations

Optical microscopes

Sensors

X-ray imaging

X-rays

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