Double pulse LED illumination for phase detection in RGB-interferometry

Markus Schake; Peter Lehmann

doi:10.1117/12.2525331

21 June 2019 Double pulse LED illumination for phase detection in RGB-interferometry

Markus Schake, Peter Lehmann

Proceedings Volume 11056, Optical Measurement Systems for Industrial Inspection XI; 110560T (2019) https://doi.org/10.1117/12.2525331
Event: SPIE Optical Metrology, 2019, Munich, Germany

Abstract

This contribution considers the application of pulsed LED illumination, synchronized with the exposure gap of a CMOS Bayer camera and an oscillating reference mirror, to record two π/2 phase shifted interferograms for quadrature based phase retrieval. Measurements of a superfine roughness standard in lateral motion are presented, demonstrating the capability of the setup to record the surface topography of moving objects. The application of the interferometric measurement data to calibrate a topography measuring wave front sensor, which is employed to support surface unwrapping is also discussed.

Conference Presentation

Citation Download Citation

Markus Schake and Peter Lehmann "Double pulse LED illumination for phase detection in RGB-interferometry", Proc. SPIE 11056, Optical Measurement Systems for Industrial Inspection XI, 110560T (21 June 2019); https://doi.org/10.1117/12.2525331

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