Thin Film Technologies In Active Matrix Addressing System Of LCDs

Yue Kuo

doi:10.1117/12.960928

21 March 1989 Thin Film Technologies In Active Matrix Addressing System Of LCDs

Yue Kuo

Proceedings Volume 1117, Display System Optics II; (1989) https://doi.org/10.1117/12.960928
Event: SPIE 1989 Technical Symposium on Aerospace Sensing, 1989, Orlando, FL, United States

Abstract

The success of Liquid Crystal Display (LCD) is recently one of the most important achievements in the flat panel display area. In addition to liquid crystal material improvements, the active matrix (AM) addressing system, prepared by the thin film technology, contributes a great deal to the success of LCDs. This paper identifies three major areas that are critical to the AM system: structure, which includes conventional and novel multilayer devices; material, which covers semiconductors, dielectrics, metals, and organic polymers; and process, which contains unit processes such as deposition, etching, lithography, contact, planarization, self-alignment, and redundant structures. Each of these areas will be critically reviewed and discussed, with emphasis on recent thin film transistor developments.

Citation Download Citation

Yue Kuo "Thin Film Technologies In Active Matrix Addressing System Of LCDs", Proc. SPIE 1117, Display System Optics II, (21 March 1989); https://doi.org/10.1117/12.960928

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