Transparent nanostructured ZnS films by low-temperature sputtering for flexible optoelectronic devices

Yuanjie Li; Shoaib Muhammad; Xuan Zhu; Chao Wu

doi:10.1117/12.2538632

19 November 2019 Transparent nanostructured ZnS films by low-temperature sputtering for flexible optoelectronic devices

Yuanjie Li, Shoaib Muhammad, Xuan Zhu, Chao Wu

Proceedings Volume 11184, Optoelectronic Devices and Integration VIII; 1118417 (2019) https://doi.org/10.1117/12.2538632
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

Wide bandgap compound ZnS is one of the promising materials used in versatile applications including solar cells, UV photodetectors and luminescent devices. Compared to other II-VI sulfides, ZnS has several advantages of non-toxicity, wider solar spectrum transparency and earth-abundance. Recent progress on optimization of synthesis techniques of ZnS allows it to be effectively realized on transparent and flexible substrates. In this work, nanostructured ZnS films were deposited on bare quartz and ITO coated glass substrates using RF sputtering at various conditions. Crystal structural, optical and surface chemical properties of ZnS films have been systematically characterized. It is revealed that ZnS films exhibit cubic β-phase crystalline structures on both substrates. The optical transmittance of ZnS films is above 85% in the visible range. The substrate temperature plays an important role in crystalline quality of ZnS films. Sputtering power exhibits more effects on the thickness and optical properties of ZnS films. Optimization of deposition parameters has been realized by investigation of optical, microstructure and crystallinity of ZnS thin films in this study.

Citation Download Citation

Yuanjie Li, Shoaib Muhammad, Xuan Zhu, and Chao Wu "Transparent nanostructured ZnS films by low-temperature sputtering for flexible optoelectronic devices", Proc. SPIE 11184, Optoelectronic Devices and Integration VIII, 1118417 (19 November 2019); https://doi.org/10.1117/12.2538632

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
7 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Gallium nitride

Light emitting diodes

Copper

Metalorganic chemical vapor deposition

Modulation

Sapphire

Cadmium sulfide

Show All Keywords

Keywords/Phrases

Search In:

Publication Years