Low cost test system for silicon photonics testing

Peng Zhang; Bo Tang; Bin Li; Yan Yang; Ruonan Liu; TingTing Li; Zhihua Li; Fujiang Lin

doi:10.1117/12.2537170

20 November 2019 Low cost test system for silicon photonics testing

Peng Zhang, Bo Tang, Bin Li, Yan Yang, Ruonan Liu, TingTing Li, Zhihua Li, Fujiang Lin

Proceedings Volume 11192, Real-time Photonic Measurements, Data Management, and Processing IV; 1119210 (2019) https://doi.org/10.1117/12.2537170
Event: SPIE/COS Photonics Asia, 2019, Hangzhou, China

Abstract

IMECAS is developing a silicon photonics process platform based on existing 22nm CMOS platform. Developing this platform requires continuous process optimization and design verification, so the wafer-level test solution presented in this paper plays an extremely important role in process validation and optimization. We design a test station which enables manual and semi-automatic for optical and electro-optical testing of passive and active silicon photonics components and circuits, including waveguides, grating couplers, splitter, photo-detectors, modulators etc. It is compatible with 200mm wafer-level testing and Die-level testing. Meanwhile, it has two coupling ways: horizontal coupling and vertical coupling. The measured repeatability of S-parameters and IV is within 6α.

Citation Download Citation

Peng Zhang, Bo Tang, Bin Li, Yan Yang, Ruonan Liu, TingTing Li, Zhihua Li, and Fujiang Lin "Low cost test system for silicon photonics testing", Proc. SPIE 11192, Real-time Photonic Measurements, Data Management, and Processing IV, 1119210 (20 November 2019); https://doi.org/10.1117/12.2537170

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available