Paper
26 February 2020 Advanced Si photonics platform for high-speed and energy-efficient optical transceivers for datacom
Quentin Wilmart, Thomas Mang, Daivid Fowler, Stéphane Brision, Karen Ribaud, Stéphane Malhouitre, Stéphane Bernabé, Corrado Sciancalepore, Bertrand Szelag, Ségolène Olivier
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Proceedings Volume 11285, Silicon Photonics XV; 112850B (2020) https://doi.org/10.1117/12.2543748
Event: SPIE OPTO, 2020, San Francisco, California, United States
Abstract
A mature silicon photonics platform including various materials for a wide range of functionalities is needed to achieve high-speed and energy-efficient transceivers for Datacom. We present the latest developments of our 200mm silicon photonics platform including new devices in silicon nitride along with active devices. In particular, we demonstrate a high performance SiN Echelle Grating CWDM (de-)multiplexer obtained with advanced photolithography tools, hybrid Si-SiN polarization splitter rotator, SiN edge coupler and low-loss, low-crosstalk Si-SiN and SiN-SiN crossings.
© (2020) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Quentin Wilmart, Thomas Mang, Daivid Fowler, Stéphane Brision, Karen Ribaud, Stéphane Malhouitre, Stéphane Bernabé, Corrado Sciancalepore, Bertrand Szelag, and Ségolène Olivier "Advanced Si photonics platform for high-speed and energy-efficient optical transceivers for datacom", Proc. SPIE 11285, Silicon Photonics XV, 112850B (26 February 2020); https://doi.org/10.1117/12.2543748
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KEYWORDS
Silicon

Waveguides

Polarization

Photonics

Etching

Coarse wavelength division multiplexing

Data communications

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