Rapid prototyping MEMS with laminated resin printing

Harrison B. Jones; Ciaran P. Moore; Andrew D. Best; Andrea J. Bubendorfer; Neil D. Glasson

doi:10.1117/12.2542968

28 February 2020 Rapid prototyping MEMS with laminated resin printing

Harrison B. Jones, Ciaran P. Moore, Andrew D. Best, Andrea J. Bubendorfer, Neil D. Glasson

Proceedings Volume 11294, Emerging Digital Micromirror Device Based Systems and Applications XII; 1129407 (2020) https://doi.org/10.1117/12.2542968
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

Interest in MEMS fabrication has been growing for the last 50 years; however, the number and quality of tools supporting rapid prototyping in this industry are limited. Laminated resin printing (LRP) combines maskless projector-based lithography with 3D printing techniques to facilitate the rapid production of high-resolution polymer structures in three dimensions with no retooling required. By selectively metalising these structures, high value functional MEMS devices can be rapidly produced, tested and iterated. Microcircuits, enclosed mechanical systems and devices based on cantilevers and membranes have all been demonstrated using this technique.

Conference Presentation

Citation Download Citation

Harrison B. Jones, Ciaran P. Moore, Andrew D. Best, Andrea J. Bubendorfer, and Neil D. Glasson "Rapid prototyping MEMS with laminated resin printing", Proc. SPIE 11294, Emerging Digital Micromirror Device Based Systems and Applications XII, 1129407 (28 February 2020); https://doi.org/10.1117/12.2542968

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