Design and fabrication of optofluidic sensor with double-layered metal nano-grating

Guohui Xiao; Guodong Liu

doi:10.1117/12.2547768

18 December 2019 Design and fabrication of optofluidic sensor with double-layered metal nano-grating

Guohui Xiao, Guodong Liu

Proceedings Volume 11336, AOPC 2019: Nanophotonics; 113360O (2019) https://doi.org/10.1117/12.2547768
Event: Applied Optics and Photonics China (AOPC2019), 2019, Beijing, China

Abstract

We propose and experimentally demonstrate an optofluidic refractive index sensor based on surface plasmon resonance with a figure of merit (FOM) reaching 20 in fluids at oblique incidence. The device consisting of a dielectric nano-grating sandwiched between double-layer gold stripes. A finite difference time domain (FDTD) method is employed to understand the optical properties and determine appropriate device parameters. The double-layered metal nano-grating (DLMNG) is fabricated by combining two beam interference lithography and electron beam evaporation deposition. A refractive index sensitivity of more than 560 nm/RIU is obtained using an optimized structure. The simple optical configuration of the DLMNG with high refractive index sensitivity make it possible for optofluidic sensors to be a promising candidate as a functional optical component in label-free biomedical sensing and integrated microfluidic chips.

Citation Download Citation

Guohui Xiao and Guodong Liu "Design and fabrication of optofluidic sensor with double-layered metal nano-grating", Proc. SPIE 11336, AOPC 2019: Nanophotonics, 113360O (18 December 2019); https://doi.org/10.1117/12.2547768

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available