Fabrication And Characterization Of Soft X-Ray Beamsplitters

J. Susini; C. Khan Malek; A. Madouri; M. Ouahabi; R. Rivoira; J. Bourneix,; R. Barcnewitz

doi:10.1117/12.961851

27 November 1989 Fabrication And Characterization Of Soft X-Ray Beamsplitters

J. Susini, C. Khan Malek, A. Madouri, M. Ouahabi, R. Rivoira, J. Bourneix,, R. Barcnewitz

Proceedings Volume 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation; (1989) https://doi.org/10.1117/12.961851
Event: 1989 International Congress on Optical Science and Engineering, 1989, Paris, France

Abstract

Conception, fabrication and characterization of a beamsplitter working in the soft X-ray range at oblique incidence are presented. A large area beamsplitter is fabricated using microfabrication technology and an inorganic film carrier. Reflectivity and transmission results are compared with calculations.

Citation Download Citation

J. Susini, C. Khan Malek, A. Madouri, M. Ouahabi, R. Rivoira, J. Bourneix,, and R. Barcnewitz "Fabrication And Characterization Of Soft X-Ray Beamsplitters", Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); https://doi.org/10.1117/12.961851

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