Paper
27 November 1989 The X-Ray Efficiency Of Replicas Of A Master Blazed Reflection Grating
A. J. F. den Boggende, M. Neviere, P. H. Videler, P. A. J. de Korte, A. C. Brinkman, S. M. Kahn
Author Affiliations +
Abstract
The influence of replication on the X-ray diffraction efficiency of blazed reflection gratings is studied by measurements at 0.834 and 1.334 nm. Full electromagnetic calculations show that the differences in the diffraction efficiency of the first generation replicas can be explained by rounding off of the tops of the grooves as measured by stylus measurements of the groove profiles. The efficiency degradation of the second generation replica can not easily be attributed to a different groove shape. The cause of this degradation is as yet unclear. The apex angle of a blazed X-ray grating is not a critical parameter for its efficiency.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
A. J. F. den Boggende, M. Neviere, P. H. Videler, P. A. J. de Korte, A. C. Brinkman, and S. M. Kahn "The X-Ray Efficiency Of Replicas Of A Master Blazed Reflection Grating", Proc. SPIE 1140, X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation, (27 November 1989); https://doi.org/10.1117/12.961874
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KEYWORDS
Diffraction

Diffraction gratings

X-rays

Mirrors

X-ray diffraction

Electromagnetism

Metrology

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