Research on the technology of correcting the transmitted wavefront GRMS of large-diameter spatial filter lens by CCOS

Zhigang Li; Zhenjun Bao; Heng Zhu; Jianpeng Cui; Dilong Wu; Ping Ma

doi:10.1117/12.2553181

31 January 2020 Research on the technology of correcting the transmitted wavefront GRMS of large-diameter spatial filter lens by CCOS

Zhigang Li, Zhenjun Bao, Heng Zhu, Jianpeng Cui, Dilong Wu, Ping Ma

Author Affiliations +

Proceedings Volume 11427, Second Target Recognition and Artificial Intelligence Summit Forum; 1142743 (2020) https://doi.org/10.1117/12.2553181
Event: Second Target Recognition and Artificial Intelligence Summit Forum, 2019, Changchun, China

Abstract

For large-scale high-power laser devices, the transmitted wavefront gradient root mean square (GRMS) is one of the most important indexes for evaluating the low-frequency distortion of spherical lenses. In this paper, for the low-frequency error index requirement of large-diameter spatial filter lens, a conformed polishing method based on composite tool is proposed in the spherical CCOS polishing stage. Based on the detection results of the optical components, the GRMS distribution is separated by low-pass filtering, and the high value of GRMS is partitioned by K-means algorithm to determine the polishing path and dwelling time. A composite conformed polishing tool is designed and the simulation analysis of the polishing tool structure and polishing stress distribution are carried out to optimize the parameters, in order to obtain an ideal GRMS convergence removal function. After experiments and production verifications of several 440×440 sized spatial filter lenses, the results show that the GRMS can be quickly converged below 7nm/cm, and the convergence rate is improved by about 50% compared with the traditional CNC polishing.

Citation Download Citation

Zhigang Li, Zhenjun Bao, Heng Zhu, Jianpeng Cui, Dilong Wu, and Ping Ma "Research on the technology of correcting the transmitted wavefront GRMS of large-diameter spatial filter lens by CCOS", Proc. SPIE 11427, Second Target Recognition and Artificial Intelligence Summit Forum, 1142743 (31 January 2020); https://doi.org/10.1117/12.2553181

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