An Evaluation Of Instrumental Correction Factors For Infrared Absorption Concentration Measurements

Aslan Baghdadi

doi:10.1117/12.969409

1 December 1989 An Evaluation Of Instrumental Correction Factors For Infrared Absorption Concentration Measurements

Aslan Baghdadi

Proceedings Volume 1145, 7th Intl Conf on Fourier Transform Spectroscopy; (1989) https://doi.org/10.1117/12.969409
Event: Seventh International Conference on Fourier and Computerized Infrared Spectroscopy, 1989, Fairfax, VA, United States

Abstract

This paper presents an analysis of a large multilaboratory set of infrared spectra to investigate the possibility of self-calibration of infrared spectrophotometers. The spectra were obtained from a round-robin study conducted in the U.S., Europe, Japan and China to determine the conversion coefficient for the determination of interstitial oxygen in silicon by infrared absorption spectroscopy.' Accurate measurement of the oxygen content of silicon wafers destined for integrated circuit manufacture is required in order to properly design the fabrication process.2

Citation Download Citation

Aslan Baghdadi "An Evaluation Of Instrumental Correction Factors For Infrared Absorption Concentration Measurements", Proc. SPIE 1145, 7th Intl Conf on Fourier Transform Spectroscopy, (1 December 1989); https://doi.org/10.1117/12.969409

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