Optical Detection In Diamond Chemical Vapor Deposition

F. G. Celii; P. E. Pehrsson; J. E. Butler

doi:10.1117/12.962068

15 January 1989 Optical Detection In Diamond Chemical Vapor Deposition

F. G. Celii, P. E. Pehrsson, J. E. Butler

Proceedings Volume 1146, Diamond Optics II; (1989) https://doi.org/10.1117/12.962068
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

We have employed a variety of in-situ optical diagnostic probes to analyze the filament-assisted diamond deposition gas-phase environment. In this paper, our studies using infrared diode laser absorption and multiphoton ionization spectroscopies are summarized. Emphasis is placed on a recently developed technique for the detection of gas-phase atomic hydrogen using third harmonic generation. The results are discussed in terms of the growth environment, the role of atomic hydrogen, and the carbon deposition mechanism.

Citation Download Citation

F. G. Celii, P. E. Pehrsson, and J. E. Butler "Optical Detection In Diamond Chemical Vapor Deposition", Proc. SPIE 1146, Diamond Optics II, (15 January 1989); https://doi.org/10.1117/12.962068

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