Calibration Of Surface Heights In An Interferometric Optical Profiler

Katherine Creath

doi:10.1117/12.962811

20 December 1989 Calibration Of Surface Heights In An Interferometric Optical Profiler

Katherine Creath

Proceedings Volume 1164, Surface Characterization and Testing II; (1989) https://doi.org/10.1117/12.962811
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

The numerical aperture (NA) of a microscope objective can affect the measurement of surface height profiles. Large NA objectives measure height values smaller than the actual values. An experiment to calibrate these effects on objectives with NAs of 0.1 to 0.95 is described using four traceable step height standards and a computer-controlled interferometric optical profiler utilizing phase-measurement interferometry techniques. The measured NA scaling factors have good agreement with a theory developed by Ingelstam and indicate that the effective NA rather than the nominal NA is the important quantity. NA scaling factors are determined to an uncertainty of ±1% for NAs of 0.5 or less and ±2% for NAs of 0.9 or greater.

Citation Download Citation

Katherine Creath "Calibration Of Surface Heights In An Interferometric Optical Profiler", Proc. SPIE 1164, Surface Characterization and Testing II, (20 December 1989); https://doi.org/10.1117/12.962811

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