Scattering From Contaminated Surfaces

Kie Nahm; Paul R. Spyak; William L. Wolfe

doi:10.1117/12.962858

2 January 1990 Scattering From Contaminated Surfaces

Kie Nahm, Paul R. Spyak, William L. Wolfe

Proceedings Volume 1165, Scatter from Optical Components; (1990) https://doi.org/10.1117/12.962858
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

Ten surfaces were exposed to a variety of clean-room environments. Particle distributions were measured by a washing technique and BRDF curves were obtained. Correlations (and lack thereof) between the two sets of data are given.

Citation Download Citation

Kie Nahm, Paul R. Spyak, and William L. Wolfe "Scattering From Contaminated Surfaces", Proc. SPIE 1165, Scatter from Optical Components, (2 January 1990); https://doi.org/10.1117/12.962858

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