Advanced Flexure Suspension Systems

Russell Rhoads; Joseph Tyburski

doi:10.1117/12.962956

9 November 1989 Advanced Flexure Suspension Systems

Russell Rhoads, Joseph Tyburski

Proceedings Volume 1167, Precision Engineering and Optomechanics; (1989) https://doi.org/10.1117/12.962956
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

An advanced flexural concept has been developed which allows a large angular mirror deflection of +/- 10 degrees in output beam space and position sensing accuracies approaching t6 microradians. A resolution of approximately 1 in 100,000 is possible with this design and the test sensors. Optical systems require precision pointing and positioning mirrors for various applications, i.e. beam alignment and communications. To date, mirrors with two degrees of large angle rotational freedom are of the gimbaled or flexural type. The advanced flexural system decreases overall mirror inertia; this quality also decreases drive motor size and lessens the complexity of the mirror system. Two prominent problems arise in current flexural designs; limited angular displacement and mirror pumping ( i.e. mirror motion perpindicular to the face of the mirror ). The advanced flexure system addresses these conditions. Mirror positional accuracy is another key component of active mirror systems. Spherical edge sensing with inductive sensors offers very high resolutions in 2 axes of rotation not possible previously with these devices.

Citation Download Citation

Russell Rhoads and Joseph Tyburski "Advanced Flexure Suspension Systems", Proc. SPIE 1167, Precision Engineering and Optomechanics, (9 November 1989); https://doi.org/10.1117/12.962956

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