Error Analysis Of Measuring Planeness For Large Terrace By Laser Collimator

Han Sen; Yang Daren; Li Xueyuan

doi:10.1117/12.963003

22 December 1989 Error Analysis Of Measuring Planeness For Large Terrace By Laser Collimator

Han Sen, Yang Daren, Li Xueyuan

Proceedings Volume 1168, Current Developments in Optical Engineering and Commercial Optics; (1989) https://doi.org/10.1117/12.963003
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

In t he paper. we have empha ii cal l y anal yzed and deduced a group of error formulas of measure' ng p1 oneness for large terrace by di agonal method from the pri nci pi e of unequal accuracy. 1 is accuracy i is hi gh. Old error formulas that are anal yzed and deduced from the equal act uracy have further been devel oped. At the same t i me, we have al so anal yzed I he accuracy of measuri ng planeness for 1 arge terrace by least area method and1 t dree-point method.

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Han Sen, Yang Daren, and Li Xueyuan "Error Analysis Of Measuring Planeness For Large Terrace By Laser Collimator", Proc. SPIE 1168, Current Developments in Optical Engineering and Commercial Optics, (22 December 1989); https://doi.org/10.1117/12.963003

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KEYWORDS

Error analysis

Optical engineering

Distance measurement

Collimators

Composites

Lithium

Mechanics

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